NanoStructures Laboratory - User contributions [en]

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2020-10-09T12:23:39Z

Mgr066:

= Wiki for UiB's NanoStructures Laboratory. =

UiB's NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

== Equipment and Standard Operating Procedures (SOPs)==

* Electron-beam lithography: Raith e-Line
** Owner: [[Martin|Martin Greve]]
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]

* Reactive-ion etcher: Plasmatherm 790+
** Owner: [[Martin|Martin Greve]]
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]

* Electron-beam evaporator: Temescal FC-2000
** Owner: [[Martin|Martin Greve]]
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]

* UV-lithography setup

* Spin-coater
** Owner: [[Martin|Martin Greve]]
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]]
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]

* Thin-film characterization: Filmetrics F-10
** Owner: [[Martin|Martin Greve]]
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]

== Procedures ==

* Lift-off

* Chrome wet-etch
** Owner: [[Martin|Martin Greve]]
** SOP: [[:File:SOP_chromewetech_2014.pdf]]

* old link: [[Procedures|Standard Operating Procedures]]
* old link: [[Tools|Available fabrication tools and facilities]]

== Facilities ==
*Equipment in nanolab: [[:File:Equipment in Nano-Lab_2015.pdf]]

Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].

Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].

* [[DI-Water|De-ionized water unit and Neutraliser]]
* [[Cooling Water|Cooling Water]]
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]
* [[Air Conditioning/Ventilation]]
* [[Pressurized Air and Nitrogen Supply]]
*Sketch_NanoLab
**Equipment [[:File:Nano-Lab equipment_2014.png]]
**Safety [[:File:Nano-Lab safety_2014.png]]
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]

== Chemicals and Consumables==

* [[Waste/Disposal]]
* [[Consumables|Available consumables/chemicals and supplier information]]
* [[Main chemicals which should be always available]]
* [[Ordering]]

== Laboratory Documents ==

*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]

*Declaration document_Laboratory
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]

*Alarm signals and power failures
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]

*General tasks for the laboratory
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]

== People ==

*Guideline for new employees/students at ift
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]
**Campus map [[:File:Guideline_campus map.pdf]]

* [[Bodil|Bodil Holst]]
* [[Bjoern|Bjørn Samelin]]
* [[Martin|Martin Greve]]
* [[Sabrina Eder]]

PhD students
* [[Carsten Hinzmann]]
* [[Espen Selfors]]
* [[Mirjam Dyrhovden Fjell]]
* [[Simen Kaasa Hellner]]

MSc-Students
* [[Olve Sti]]
* [[Minh Chi To]]
* [[John Benjamin Lothe]]

== Further Information ==

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

* MIT open course ware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]

= Information on using MediaWiki =

* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]

Consult the [http://meta.wikimedia.org/wiki/Help:Contents User's Guide] for information on using the wiki software.

E-Line Calendar

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