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	<updated>2026-04-25T20:05:18Z</updated>
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	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1356</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1356"/>
		<updated>2015-06-18T08:32:58Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
*Equipment in nanolab: [[:File:Equipment in Nano-Lab_2015.pdf]] &lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
* [[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1355</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1355"/>
		<updated>2015-06-18T08:28:02Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
*Equipment in nanolab: [[:File:Equipment in Nano-Lab_2015.pdf]] &lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
* [[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Equipment_Equipment_in_Nano-Lab.pdf&amp;diff=1354</id>
		<title>File:Equipment Equipment in Nano-Lab.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Equipment_Equipment_in_Nano-Lab.pdf&amp;diff=1354"/>
		<updated>2015-06-18T08:27:33Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Blanked the page&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Equipment_Equipment_in_Nano-Lab.pdf&amp;diff=1353</id>
		<title>File:Equipment Equipment in Nano-Lab.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Equipment_Equipment_in_Nano-Lab.pdf&amp;diff=1353"/>
		<updated>2015-06-18T08:27:15Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;Equipment: [[:File:Equipment in Nano-Lab_2015.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Equipment_in_Nano-Lab_2015.pdf&amp;diff=1352</id>
		<title>File:Equipment in Nano-Lab 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Equipment_in_Nano-Lab_2015.pdf&amp;diff=1352"/>
		<updated>2015-06-18T08:26:57Z</updated>

		<summary type="html">&lt;p&gt;Mos002: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Ordering&amp;diff=1351</id>
		<title>Ordering</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Ordering&amp;diff=1351"/>
		<updated>2015-06-18T08:22:13Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;Orders: [[:File:Orders_2015_2.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015_2.pdf&amp;diff=1350</id>
		<title>File:Orders 2015 2.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015_2.pdf&amp;diff=1350"/>
		<updated>2015-06-18T08:22:04Z</updated>

		<summary type="html">&lt;p&gt;Mos002: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1349</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1349"/>
		<updated>2015-06-18T08:21:19Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
*Equipment in nanolab&lt;br /&gt;
**Equipment: [[:File:equipment Equipment in Nano-Lab.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
* [[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1348</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1348"/>
		<updated>2015-06-18T08:20:38Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
*Equipment in nanolab&lt;br /&gt;
**Equipment: [[:File:equipment Equipment in Nano-Lab.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
** Orders: [[:File:Orders_June2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
* [[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_June2015.pdf&amp;diff=1347</id>
		<title>File:Orders June2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_June2015.pdf&amp;diff=1347"/>
		<updated>2015-06-18T08:20:31Z</updated>

		<summary type="html">&lt;p&gt;Mos002: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1346</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1346"/>
		<updated>2015-06-18T08:19:21Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
*Equipment in nanolab&lt;br /&gt;
**Equipment: [[:File:equipment Equipment in Nano-Lab.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
* [[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Ordering&amp;diff=1345</id>
		<title>Ordering</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Ordering&amp;diff=1345"/>
		<updated>2015-06-18T08:18:35Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;Orders: [[:File:Orders_2015.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1344</id>
		<title>File:Orders 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1344"/>
		<updated>2015-06-18T08:18:26Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Mos002 uploaded a new version of &amp;amp;quot;File:Orders 2015.pdf&amp;amp;quot;: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;Orders: [[:File:Orders_2015.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Ordering&amp;diff=1343</id>
		<title>Ordering</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Ordering&amp;diff=1343"/>
		<updated>2015-06-18T08:16:13Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Blanked the page&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1342</id>
		<title>File:Orders 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1342"/>
		<updated>2015-06-18T08:15:24Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Mos002 uploaded a new version of &amp;amp;quot;File:Orders 2015.pdf&amp;amp;quot;: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;Orders: [[:File:Orders_2015.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1341</id>
		<title>File:Orders 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1341"/>
		<updated>2015-06-18T08:14:45Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Mos002 uploaded a new version of &amp;amp;quot;File:Orders 2015.pdf&amp;amp;quot;: Reverted to version as of 08:13, 18 June 2015&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;Orders: [[:File:Orders_2015.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1340</id>
		<title>File:Orders 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1340"/>
		<updated>2015-06-18T08:14:18Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Mos002 uploaded a new version of &amp;amp;quot;File:Orders 2015.pdf&amp;amp;quot;: Reverted to version as of 11:22, 4 May 2015&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;Orders: [[:File:Orders_2015.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1339</id>
		<title>File:Orders 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1339"/>
		<updated>2015-06-18T08:14:07Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;Orders: [[:File:Orders_2015.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1338</id>
		<title>File:Orders 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1338"/>
		<updated>2015-06-18T08:13:48Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Mos002 uploaded a new version of &amp;amp;quot;File:Orders 2015.pdf&amp;amp;quot;: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1337</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1337"/>
		<updated>2015-06-18T08:01:04Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
*Equipment in nanolab&lt;br /&gt;
**Equipment: [[:File:equipment Equipment in Nano-Lab.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
* [[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1336</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1336"/>
		<updated>2015-06-18T08:00:01Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
*Inventory list - Equipment&lt;br /&gt;
**Equipment: [[:File:equipment Equipment in Nano-Lab.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
* [[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Equipment_Equipment_in_Nano-Lab.pdf&amp;diff=1335</id>
		<title>File:Equipment Equipment in Nano-Lab.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Equipment_Equipment_in_Nano-Lab.pdf&amp;diff=1335"/>
		<updated>2015-06-18T07:59:39Z</updated>

		<summary type="html">&lt;p&gt;Mos002: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1301</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1301"/>
		<updated>2015-05-07T12:24:10Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
* [[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1300</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1300"/>
		<updated>2015-05-07T12:22:37Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1299</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1299"/>
		<updated>2015-05-07T12:20:41Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
== Procedures ==&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1298</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1298"/>
		<updated>2015-05-07T12:19:08Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Ordering&amp;diff=1297</id>
		<title>Ordering</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Ordering&amp;diff=1297"/>
		<updated>2015-05-04T11:22:31Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;*Ordering :File:Orders_2015.pdf&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;*Ordering [[:File:Orders_2015.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1296</id>
		<title>File:Orders 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Orders_2015.pdf&amp;diff=1296"/>
		<updated>2015-05-04T11:22:18Z</updated>

		<summary type="html">&lt;p&gt;Mos002: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Waste/Disposal&amp;diff=1295</id>
		<title>Waste/Disposal</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Waste/Disposal&amp;diff=1295"/>
		<updated>2015-05-04T11:21:26Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* Declaration document :File:DeklareringsSkjema_eng.pdf * Contact persons :File:Avfallskontakter.pdf&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* Declaration document [[:File:DeklareringsSkjema_eng.pdf]]&lt;br /&gt;
* Contact persons [[:File:Avfallskontakter.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Avfallskontakter.pdf&amp;diff=1294</id>
		<title>File:Avfallskontakter.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Avfallskontakter.pdf&amp;diff=1294"/>
		<updated>2015-05-04T11:21:13Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Mos002 uploaded a new version of &amp;amp;quot;File:Avfallskontakter.pdf&amp;amp;quot;: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:DeklareringsSkjema_eng.pdf&amp;diff=1293</id>
		<title>File:DeklareringsSkjema eng.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:DeklareringsSkjema_eng.pdf&amp;diff=1293"/>
		<updated>2015-05-04T11:20:40Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Mos002 uploaded a new version of &amp;amp;quot;File:DeklareringsSkjema eng.pdf&amp;amp;quot;: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1292</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1292"/>
		<updated>2015-05-04T11:20:18Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste/Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1291</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1291"/>
		<updated>2015-05-04T11:19:49Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Waste Disposall]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1290</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1290"/>
		<updated>2015-05-04T11:19:20Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
== Chemicals and Consumables==&lt;br /&gt;
&lt;br /&gt;
* [[Chemical Disposal|Chemical Disposal]]&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
* [[Ordering]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1289</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1289"/>
		<updated>2015-05-04T11:15:33Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
* [[Chemical Disposal|Chemical Disposal]]&lt;br /&gt;
&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*General tasks for the laboratory&lt;br /&gt;
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Tasks_in_the_laboratory-general_2015.pdf&amp;diff=1288</id>
		<title>File:Tasks in the laboratory-general 2015.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Tasks_in_the_laboratory-general_2015.pdf&amp;diff=1288"/>
		<updated>2015-05-04T11:15:11Z</updated>

		<summary type="html">&lt;p&gt;Mos002: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_chemicals_which_should_be_always_available&amp;diff=1287</id>
		<title>Main chemicals which should be always available</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_chemicals_which_should_be_always_available&amp;diff=1287"/>
		<updated>2015-05-04T10:58:36Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* Main chemicals in Nano-lab: :File:Main_chemicals_consumables_2014.pdf&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* Main chemicals in Nano-lab: [[:File:Main_chemicals_consumables_2014.pdf]]&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=File:Main_chemicals_consumables_2014.pdf&amp;diff=1286</id>
		<title>File:Main chemicals consumables 2014.pdf</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=File:Main_chemicals_consumables_2014.pdf&amp;diff=1286"/>
		<updated>2015-05-04T10:58:15Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Mos002 uploaded a new version of &amp;amp;quot;File:Main chemicals consumables 2014.pdf&amp;amp;quot;: MsUpload&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;MsUpload&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1285</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1285"/>
		<updated>2015-05-04T10:57:59Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
* [[Chemical Disposal|Chemical Disposal]]&lt;br /&gt;
&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
* [[Main chemicals which should be always available]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Ranveig_Flatab%C3%B8&amp;diff=1284</id>
		<title>Ranveig Flatabø</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Ranveig_Flatab%C3%B8&amp;diff=1284"/>
		<updated>2015-05-04T10:53:33Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* http://www.uib.no/personer/Ranveig.Flatabø&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* http://www.uib.no/personer/Ranveig.Flatabø&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=V%C3%A5rin_Renate_Andvik_Holm&amp;diff=1283</id>
		<title>Vårin Renate Andvik Holm</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=V%C3%A5rin_Renate_Andvik_Holm&amp;diff=1283"/>
		<updated>2015-05-04T10:53:00Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* http://www.uib.no/personer/Vårin.Renate.Andvik.Holm&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* http://www.uib.no/personer/Vårin.Renate.Andvik.Holm&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Stamatina_Karakitsiou&amp;diff=1282</id>
		<title>Stamatina Karakitsiou</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Stamatina_Karakitsiou&amp;diff=1282"/>
		<updated>2015-05-04T10:52:34Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* http://www.uib.no/personer/Stamatina.Karakitsiou&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* http://www.uib.no/personer/Stamatina.Karakitsiou&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Melanie_Ostermann&amp;diff=1281</id>
		<title>Melanie Ostermann</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Melanie_Ostermann&amp;diff=1281"/>
		<updated>2015-05-04T10:52:03Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* http://www.uib.no/en/persons/Melanie.Ostermann&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* http://www.uib.no/en/persons/Melanie.Ostermann&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Naureen_Akhtar&amp;diff=1280</id>
		<title>Naureen Akhtar</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Naureen_Akhtar&amp;diff=1280"/>
		<updated>2015-05-04T10:50:55Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* http://www.uib.no/en/persons/Naureen.Akhtar&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* http://www.uib.no/en/persons/Naureen.Akhtar&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1279</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1279"/>
		<updated>2015-05-04T10:50:33Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
* [[Chemical Disposal|Chemical Disposal]]&lt;br /&gt;
&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[Naureen Akhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=NaureenAkhtar&amp;diff=1278</id>
		<title>NaureenAkhtar</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=NaureenAkhtar&amp;diff=1278"/>
		<updated>2015-05-04T10:50:20Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* http://www.uib.no/en/persons/Naureen.Akhtar&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* http://www.uib.no/en/persons/Naureen.Akhtar&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Sabrina_Eder&amp;diff=1277</id>
		<title>Sabrina Eder</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Sabrina_Eder&amp;diff=1277"/>
		<updated>2015-05-04T10:49:41Z</updated>

		<summary type="html">&lt;p&gt;Mos002: Created page with &amp;quot;* http://www.uib.no/en/persons/Sabrina.Daniela.Eder&amp;quot;&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;* http://www.uib.no/en/persons/Sabrina.Daniela.Eder&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1276</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1276"/>
		<updated>2015-05-04T10:48:26Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
* [[Chemical Disposal|Chemical Disposal]]&lt;br /&gt;
&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[NaureenAkhtar]]&lt;br /&gt;
* [[Arivu Arivazhagan]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1275</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1275"/>
		<updated>2015-05-04T10:46:00Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
* [[Chemical Disposal|Chemical Disposal]]&lt;br /&gt;
&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Sabrina Eder]]&lt;br /&gt;
* [[NaureenAkhtar]]&lt;br /&gt;
* [[Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Stamatina Karakitsiou]]&lt;br /&gt;
* [[Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Simen Askeland]]&lt;br /&gt;
* [[Truls Andersen]]&lt;br /&gt;
* [[Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
	<entry>
		<id>http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1274</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="http://nanolab.wiki.uib.no/index.php?title=Main_Page&amp;diff=1274"/>
		<updated>2015-05-04T10:44:01Z</updated>

		<summary type="html">&lt;p&gt;Mos002: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;= Wiki for UiB&#039;s NanoStructures Laboratory. =&lt;br /&gt;
&lt;br /&gt;
UiB&#039;s NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.&lt;br /&gt;
&lt;br /&gt;
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project. &lt;br /&gt;
&lt;br /&gt;
== Equipment and Standard Operating Procedures (SOPs)==&lt;br /&gt;
&lt;br /&gt;
* Electron-beam lithography: Raith e-Line&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Reactive-ion etcher: Plasmatherm 790+&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Electron-beam evaporator: Temescal FC-2000&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Temescal_EbeamEvaporator-1_2014.pdf]]&lt;br /&gt;
** Maintenance: [[:File:SOP_Temescal_Maintenance_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* UV-lithography setup&lt;br /&gt;
&lt;br /&gt;
* Spin-coater&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* Convection Oven&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]&lt;br /&gt;
&lt;br /&gt;
* Hotplates&lt;br /&gt;
&lt;br /&gt;
* Ultrasonic Bath&lt;br /&gt;
&lt;br /&gt;
* Sputter coater&lt;br /&gt;
** Owner: [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]&lt;br /&gt;
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]&lt;br /&gt;
&lt;br /&gt;
* Thin-film characterization: Filmetrics F-10&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]&lt;br /&gt;
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Cleanroom|ISO-class 5 cleanroom]]&lt;br /&gt;
* [[Fumehood Cleanroom|Cleanroom Fumehood]]&lt;br /&gt;
* [[Fumehood Outerlab|Outerlab Fumehood]]&lt;br /&gt;
&lt;br /&gt;
* Lift-off&lt;br /&gt;
&lt;br /&gt;
* Chrome wet-etch&lt;br /&gt;
** Owner: [[Martin|Martin Greve]]&lt;br /&gt;
** SOP: [[:File:SOP_chromewetech_2014.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
* old link: [[Procedures|Standard Operating Procedures]]&lt;br /&gt;
* old link: [[Tools|Available fabrication tools and facilities]]&lt;br /&gt;
&lt;br /&gt;
== Facilities ==&lt;br /&gt;
&lt;br /&gt;
Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].&lt;br /&gt;
&lt;br /&gt;
* [[DI-Water|De-ionized water unit and Neutraliser]]&lt;br /&gt;
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]&lt;br /&gt;
* [[Cooling Water|Cooling Water]]&lt;br /&gt;
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]&lt;br /&gt;
* [[Electricity|Information on Electricity]]&lt;br /&gt;
* [[Air Conditioning/Ventilation]]&lt;br /&gt;
* [[Pressurized Air and Nitrogen Supply]]&lt;br /&gt;
*Sketch_NanoLab&lt;br /&gt;
**Equipment [[:File:Nano-Lab equipment_2014.png]]&lt;br /&gt;
**Safety [[:File:Nano-Lab safety_2014.png]]&lt;br /&gt;
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]&lt;br /&gt;
&lt;br /&gt;
* [[Chemical Disposal|Chemical Disposal]]&lt;br /&gt;
&lt;br /&gt;
* [[Consumables|Available consumables/chemicals and supplier information]]&lt;br /&gt;
&lt;br /&gt;
== Laboratory Documents ==&lt;br /&gt;
&lt;br /&gt;
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)&lt;br /&gt;
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Declaration document_Laboratory&lt;br /&gt;
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
*Alarm signals and power failures&lt;br /&gt;
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== People ==&lt;br /&gt;
&lt;br /&gt;
*Guideline for new employees/students at ift&lt;br /&gt;
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]&lt;br /&gt;
**Campus map [[:File:Guideline_campus map.pdf]]&lt;br /&gt;
&lt;br /&gt;
* [[Bodil|Bodil Holst]]&lt;br /&gt;
* [[Bjoern|Bjørn Samelin]]&lt;br /&gt;
* [[Xiaodong|Xiaodong Guo]]&lt;br /&gt;
* [[pengfei|Pengfei Han]]&lt;br /&gt;
* [[Martin|Martin Greve]]&lt;br /&gt;
* [[Rachid|Rachid Maad]]&lt;br /&gt;
* [[Eder|Sabrina Eder]]&lt;br /&gt;
* [[Akhtar|NaureenAkhtar]]&lt;br /&gt;
* [[Ostermann|Melanie Ostermann]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
PhD students&lt;br /&gt;
*[[Karakitsiou|Stamatina Karakitsiou]]&lt;br /&gt;
* [[Andvik Holm|Vårin Renate Andvik Holm ]]&lt;br /&gt;
* [[Flatabø|Ranveig Flatabø]]&lt;br /&gt;
&lt;br /&gt;
MSc-Students&lt;br /&gt;
* [[Askeland|Simen Askeland]]&lt;br /&gt;
* [[Andersen|Truls Andersen]]&lt;br /&gt;
* [[Salvador Palau|Adrià Salvador Palau]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Further Information ==&lt;br /&gt;
&lt;br /&gt;
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:&lt;br /&gt;
&lt;br /&gt;
* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]&lt;br /&gt;
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]&lt;br /&gt;
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]&lt;br /&gt;
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]&lt;br /&gt;
&lt;br /&gt;
= Information on using MediaWiki =&lt;br /&gt;
&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]&lt;br /&gt;
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]&lt;br /&gt;
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]&lt;br /&gt;
&lt;br /&gt;
Consult the [http://meta.wikimedia.org/wiki/Help:Contents User&#039;s Guide] for information on using the wiki software.&lt;/div&gt;</summary>
		<author><name>Mos002</name></author>
	</entry>
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