NanoStructures Laboratory - User contributions [en]

File:Basics for the laboratory 2024.pdf

2024-04-24T05:06:59Z

Sed002: Sed002 uploaded a new version of File:Basics for the laboratory 2024.pdf

Main Page

2024-02-06T09:41:27Z

Sed002: /* Procedures */

= Wiki for UiB's NanoStructures Laboratory. =

UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

In addition we have several imaging and analysis tools like Optical Microscopes, an AFM, a Thin Film measurements system and a Contact Angle measurement system.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

== Equipment and Standard Operating Procedures (SOPs)==

* Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
** Primary staff / Contact: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.
_______________________________________________
* Electron-beam lithography: Raith e-Line
** Reservation: e-line google calendar
** SOP imaginng: [[:File:Raith_imaging SOP_2023.pdf]]
** SOP lithography: [[:File:SOP_Raith_E-Line_2023.pdf]]
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2023.pdf]]

* Sputter coater
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]
_______________________________________________
* Electron-beam evaporator: Temescal FC-2000
** Reservation: Temescal google calendar
** SOP: [[:File:SOP_Temescal_EbeamEvaporator_2023.pdf]]
** Maintenance: [[:File:SOP_Temescal_EbeamEvaporator_Maintenance_2023.pdf]]

* Optical microscope & Stereomicroscope: Nikon Eclipse LV100ND & Nikon SMZ 1500
** Reservation: no reservation needed
** SOP Eclipse LV100ND: [[:File:SOP_Nikon_LV_1000_2023.pdf]]
** SOP SMZ 1500: [[:File:SOP_Nikon_SMZ 1500_Stereomicroscope_2023.pdf]]
** Manual Eclipse LV100ND: ask Sabrina for .pdf file.

* Contact Angle Measurement System: dataphysics OCA 20L
** Reservation: no reservation needed
** SOP: [[:File:SOP_Contact Angle_2023.pdf]]
** Manual OCA 206 E: ask Sabrina for .pdf file.

* Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mask Aligner_2023.pdf]]
** Manual MJB-4: ask Sabrina for .pdf file.
_______________________________________________
* Reactive-ion etcher: Plasmatherm 790+
** Reservation: Plasmatherm google calendar
** SOP: [[:File:SOP_Plasmatherm_790Plus_2023.pdf]]
** Maintenance: [[:File:SOP_Plasmatherm_790Plus_Maintenance_2023.pdf]]

* UV-lithography setup
** Reservation: no reservation needed
** SOP: direct training

* Spin-coater
** Reservation: no reservation needed
** SOP: [[:File:SOP_Laurell WS 400BX Spin coater_2023.pdf]]
** Manual: [[:File:LITE_Manual_WE-400BX_Spin coater_c.pdf]]

* Thin-film characterization: Filmetrics F-10
** Reservation: no reservation needed
** SOP: [[:File:SOP_Filmetrics_2023.pdf]]
_______________________________________________
* Atomic Force Microscope: Jupiter AFM Oxford Instruments - Asylumn Research
** Reservation: AFM google calendar
** SOP: [[:File:SOP_Jupiter AFM_2023.pdf]]
** Manual:
*** AR Jupiter User Guide_19C: ask Sabrina for .pdf file.
*** AR Applications Guide_19C: ask Sabrina for .pdf file.
_______________________________________________
* Fluorination Chamber: SPTS XETCH
** Reservation: no reservation needed
** SOP: [[:File:SOP_XetchX3_Fluorination chamber_2023.pdf]]
** Manual:[[:File:Xactic-XetchX3-System-Manual.pdf]]

== Procedures ==

* Lift-off

* Chrome wet-etch
** Owner: [[Martin|Martin Greve]]
** SOP: [[:File:SOP_chromewetech_2014.pdf]]

* old link: [[Procedures|Standard Operating Procedures]]
* old link: [[Tools|Available fabrication tools and facilities]]

== Facilities ==
*Equipment in nanolab: [[:File:Nanogroup Instrumentation_2023.pdf]]
* Old Equipment list 2015: [[:File:Equipment in Nano-Lab_2015.pdf]]

Here is a description of the available facilities (old): [[:File:Facilities_2014.pdf]].

Here is a summary of the maintenance documents (old): [[:File:Facilities_Maintenance-2014.pdf]].

* [[DI-Water|De-ionized water unit and Neutraliser]]
* [[Cooling Water|Cooling Water]]
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]
* [[Air Conditioning/Ventilation]]
* [[Pressurized Air and Nitrogen Supply]]
*Sketch_NanoLab
**Equipment [[:File:Nano-Lab equipment_2014.png]]
**Safety [[:File:Nano-Lab safety_2014.png]]
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]

== Chemicals and Consumables==

* [[Waste/Disposal]]
* [[Consumables|Available consumables/chemicals and supplier information]]
* [[Main chemicals which should be always available]]
* Ordering: please contact Sabrina

== Laboratory Documents ==

*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
** SOP:[[:File:Basics for the laboratory_2024.pdf]]

*Alarm signals and power failures
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]

== People ==
Professors / Engineers / Researchers / Post Doc`s
* [[Martin|Martin Greve]]
* [[Bodil|Bodil Holst]]
* [[Justas|Justas Zalieckas]]
* [[Sabrina Eder]]
* [[Bjoern|Bjørn Samelin]]
* [[Ranveig|Ranveig Flatabø]]

PhD students
* [[Carsten Hinzmann]]
* [[Mirjam Dyrhovden Fjell]]
* [[John Benjamin Lothe]]
* [[Simen Kaasa Hellner]]
* [[Marit Hougan]]

MSc-Students
* [[Olve Sti]]
* [[Minh Chi To]]
* [[John Benjamin Lothe]]

Guideline for new employees/students at ift
**Campus map [[:File:Guideline_campus map.pdf]]

== Further Information ==

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

* MIT open course ware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]

= Information on using MediaWiki =

* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]

Consult the [http://meta.wikimedia.org/wiki/Help:Contents User's Guide] for information on using the wiki software.

Main Page

2024-02-06T09:41:10Z

Sed002:

Sed002:

File:SOP XetchX3 Fluorination chamber 2023.pdf

2023-11-16T08:51:27Z

Sed002:

Main Page

File:SOP Plasmatherm 790Plus Maintenance 2023.pdf

2023-11-16T08:02:36Z

Sed002:

Main Page

2023-11-16T08:02:23Z

Sed002: /* Equipment and Standard Operating Procedures (SOPs) */

= Wiki for UiB's NanoStructures Laboratory. =

UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

== Equipment and Standard Operating Procedures (SOPs)==

* Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
** Primary staff: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.
_______________________________________________
* Electron-beam lithography: Raith e-Line
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: e-line google calendar
** SOP imaginng: [[:File:Raith_imaging SOP_2023.pdf]]
** SOP lithography: [[:File:SOP_Raith_E-Line_2023.pdf]]
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2023.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]
_______________________________________________
* Electron-beam evaporator: Temescal FC-2000
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Temescal google calendar
** SOP: [[:File:SOP_Temescal_EbeamEvaporator_2023.pdf]]
** Maintenance: [[:File:SOP_Temescal_EbeamEvaporator_Maintenance_2023.pdf]]

* Optical microscope & Stereomicroscope: Nikon Eclipse LV100ND & Nikon SMZ 1500
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP Eclipse LV100ND: [[:File:SOP_Nikon_LV_1000_2023.pdf]]
** SOP SMZ 1500: [[:File:SOP_Nikon_SMZ 1500_Stereomicroscope_2023.pdf]]
** Manual Eclipse LV100ND: ask Sabrina for .pdf file.

* Contact Angle Measurement System: dataphysics OCA 20L
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Contact Angle_2023.pdf]]
** Manual OCA 206 E: ask Sabrina for .pdf file.

* Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mask Aligner_2023.pdf]]
** Manual MJB-4: ask Sabrina for .pdf file.
_______________________________________________
* Reactive-ion etcher: Plasmatherm 790+
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Plasmatherm google calendar
** SOP: [[:File:SOP_Plasmatherm_790Plus_2023.pdf]]
** Maintenance: [[:File:SOP_Plasmatherm_790Plus_Maintenance_2023.pdf]]

* UV-lithography setup

* Spin-coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]

* Thin-film characterization: Filmetrics F-10
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]

== Procedures ==

* Lift-off

* Chrome wet-etch
** Owner: [[Martin|Martin Greve]]
** SOP: [[:File:SOP_chromewetech_2014.pdf]]

* old link: [[Procedures|Standard Operating Procedures]]
* old link: [[Tools|Available fabrication tools and facilities]]

== Facilities ==
*Equipment in nanolab: [[:File:Equipment in Nano-Lab_2015.pdf]]

Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].

Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].

* [[DI-Water|De-ionized water unit and Neutraliser]]
* [[Cooling Water|Cooling Water]]
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]
* [[Air Conditioning/Ventilation]]
* [[Pressurized Air and Nitrogen Supply]]
*Sketch_NanoLab
**Equipment [[:File:Nano-Lab equipment_2014.png]]
**Safety [[:File:Nano-Lab safety_2014.png]]
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]

== Chemicals and Consumables==

* [[Waste/Disposal]]
* [[Consumables|Available consumables/chemicals and supplier information]]
* [[Main chemicals which should be always available]]
* [[Ordering]]

== Laboratory Documents ==

*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]

*Declaration document_Laboratory
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]

*Alarm signals and power failures
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]

*General tasks for the laboratory
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]

== People ==

*Guideline for new employees/students at ift
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]
**Campus map [[:File:Guideline_campus map.pdf]]

* [[Martin|Martin Greve]]
* [[Bodil|Bodil Holst]]
* [[Justas|Justas Zalieckas]]
* [[Sabrina Eder]]
* [[Bjoern|Bjørn Samelin]]
* [[Ranveig|Ranveig Flatabø]]

PhD students
* [[Carsten Hinzmann]]
* [[Mirjam Dyrhovden Fjell]]
* [[John Benjamin Lothe]]
* [[Simen Kaasa Hellner]]
* [[Marit Hougan]]

MSc-Students
* [[Olve Sti]]
* [[Minh Chi To]]
* [[John Benjamin Lothe]]

== Further Information ==

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

* MIT open course ware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]

= Information on using MediaWiki =

* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]

Consult the [http://meta.wikimedia.org/wiki/Help:Contents User's Guide] for information on using the wiki software.

File:SOP Plasmatherm 790Plus 2023.pdf

2023-11-16T08:00:40Z

Sed002:

Main Page

2023-11-16T08:00:28Z

Sed002:

= Wiki for UiB's NanoStructures Laboratory. =

UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

== Equipment and Standard Operating Procedures (SOPs)==

* Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
** Primary staff: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.
_______________________________________________
* Electron-beam lithography: Raith e-Line
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: e-line google calendar
** SOP imaginng: [[:File:Raith_imaging SOP_2023.pdf]]
** SOP lithography: [[:File:SOP_Raith_E-Line_2023.pdf]]
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2023.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]
_______________________________________________
* Electron-beam evaporator: Temescal FC-2000
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Temescal google calendar
** SOP: [[:File:SOP_Temescal_EbeamEvaporator_2023.pdf]]
** Maintenance: [[:File:SOP_Temescal_EbeamEvaporator_Maintenance_2023.pdf]]

* Optical microscope & Stereomicroscope: Nikon Eclipse LV100ND & Nikon SMZ 1500
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP Eclipse LV100ND: [[:File:SOP_Nikon_LV_1000_2023.pdf]]
** SOP SMZ 1500: [[:File:SOP_Nikon_SMZ 1500_Stereomicroscope_2023.pdf]]
** Manual Eclipse LV100ND: ask Sabrina for .pdf file.

* Contact Angle Measurement System: dataphysics OCA 20L
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Contact Angle_2023.pdf]]
** Manual OCA 206 E: ask Sabrina for .pdf file.

* Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mask Aligner_2023.pdf]]
** Manual MJB-4: ask Sabrina for .pdf file.
_______________________________________________
* Reactive-ion etcher: Plasmatherm 790+
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Plasmatherm google calendar
** SOP: [[:File:SOP_Plasmatherm_790Plus_2023.pdf]]
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]

* UV-lithography setup

* Spin-coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]

* Thin-film characterization: Filmetrics F-10
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]

== Procedures ==

* Lift-off

* Chrome wet-etch
** Owner: [[Martin|Martin Greve]]
** SOP: [[:File:SOP_chromewetech_2014.pdf]]

* old link: [[Procedures|Standard Operating Procedures]]
* old link: [[Tools|Available fabrication tools and facilities]]

== Facilities ==
*Equipment in nanolab: [[:File:Equipment in Nano-Lab_2015.pdf]]

Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].

Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].

* [[DI-Water|De-ionized water unit and Neutraliser]]
* [[Cooling Water|Cooling Water]]
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]
* [[Air Conditioning/Ventilation]]
* [[Pressurized Air and Nitrogen Supply]]
*Sketch_NanoLab
**Equipment [[:File:Nano-Lab equipment_2014.png]]
**Safety [[:File:Nano-Lab safety_2014.png]]
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]

== Chemicals and Consumables==

* [[Waste/Disposal]]
* [[Consumables|Available consumables/chemicals and supplier information]]
* [[Main chemicals which should be always available]]
* [[Ordering]]

== Laboratory Documents ==

*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]

*Declaration document_Laboratory
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]

*Alarm signals and power failures
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]

*General tasks for the laboratory
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]

== People ==

*Guideline for new employees/students at ift
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]
**Campus map [[:File:Guideline_campus map.pdf]]

* [[Martin|Martin Greve]]
* [[Bodil|Bodil Holst]]
* [[Justas|Justas Zalieckas]]
* [[Sabrina Eder]]
* [[Bjoern|Bjørn Samelin]]
* [[Ranveig|Ranveig Flatabø]]

PhD students
* [[Carsten Hinzmann]]
* [[Mirjam Dyrhovden Fjell]]
* [[John Benjamin Lothe]]
* [[Simen Kaasa Hellner]]
* [[Marit Hougan]]

MSc-Students
* [[Olve Sti]]
* [[Minh Chi To]]
* [[John Benjamin Lothe]]

== Further Information ==

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

* MIT open course ware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]

= Information on using MediaWiki =

* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]

Consult the [http://meta.wikimedia.org/wiki/Help:Contents User's Guide] for information on using the wiki software.

Main Page

2023-11-16T07:58:20Z

Sed002: /* Equipment and Standard Operating Procedures (SOPs) */

= Wiki for UiB's NanoStructures Laboratory. =

UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

== Equipment and Standard Operating Procedures (SOPs)==

* Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
** Primary staff: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.
_______________________________________________
* Electron-beam lithography: Raith e-Line
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: e-line google calendar
** SOP imaginng: [[:File:Raith_imaging SOP_2023.pdf]]
** SOP lithography: [[:File:SOP_Raith_E-Line_2023.pdf]]
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2023.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]
_______________________________________________
* Electron-beam evaporator: Temescal FC-2000
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Temescal google calendar
** SOP: [[:File:SOP_Temescal_EbeamEvaporator_2023.pdf]]
** Maintenance: [[:File:SOP_Temescal_EbeamEvaporator_Maintenance_2023.pdf]]

* Optical microscope & Stereomicroscope: Nikon Eclipse LV100ND & Nikon SMZ 1500
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP Eclipse LV100ND: [[:File:SOP_Nikon_LV_1000_2023.pdf]]
** SOP SMZ 1500: [[:File:SOP_Nikon_SMZ 1500_Stereomicroscope_2023.pdf]]
** Manual Eclipse LV100ND: ask Sabrina for .pdf file.

* Contact Angle Measurement System: dataphysics OCA 20L
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Contact Angle_2023.pdf]]
** Manual OCA 206 E: ask Sabrina for .pdf file.

* Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mask Aligner_2023.pdf]]
** Manual MJB-4: ask Sabrina for .pdf file.
_______________________________________________
* Reactive-ion etcher: Plasmatherm 790+
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Plasmatherm google calendar
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]

* UV-lithography setup

* Spin-coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]

* Thin-film characterization: Filmetrics F-10
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]

== Procedures ==

* Lift-off

* Chrome wet-etch
** Owner: [[Martin|Martin Greve]]
** SOP: [[:File:SOP_chromewetech_2014.pdf]]

* old link: [[Procedures|Standard Operating Procedures]]
* old link: [[Tools|Available fabrication tools and facilities]]

== Facilities ==
*Equipment in nanolab: [[:File:Equipment in Nano-Lab_2015.pdf]]

Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].

Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].

* [[DI-Water|De-ionized water unit and Neutraliser]]
* [[Cooling Water|Cooling Water]]
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]
* [[Air Conditioning/Ventilation]]
* [[Pressurized Air and Nitrogen Supply]]
*Sketch_NanoLab
**Equipment [[:File:Nano-Lab equipment_2014.png]]
**Safety [[:File:Nano-Lab safety_2014.png]]
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]

== Chemicals and Consumables==

* [[Waste/Disposal]]
* [[Consumables|Available consumables/chemicals and supplier information]]
* [[Main chemicals which should be always available]]
* [[Ordering]]

== Laboratory Documents ==

*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]

*Declaration document_Laboratory
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]

*Alarm signals and power failures
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]

*General tasks for the laboratory
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]

== People ==

*Guideline for new employees/students at ift
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]
**Campus map [[:File:Guideline_campus map.pdf]]

* [[Martin|Martin Greve]]
* [[Bodil|Bodil Holst]]
* [[Justas|Justas Zalieckas]]
* [[Sabrina Eder]]
* [[Bjoern|Bjørn Samelin]]
* [[Ranveig|Ranveig Flatabø]]

PhD students
* [[Carsten Hinzmann]]
* [[Mirjam Dyrhovden Fjell]]
* [[John Benjamin Lothe]]
* [[Simen Kaasa Hellner]]
* [[Marit Hougan]]

MSc-Students
* [[Olve Sti]]
* [[Minh Chi To]]
* [[John Benjamin Lothe]]

== Further Information ==

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

* MIT open course ware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]

= Information on using MediaWiki =

* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]

Consult the [http://meta.wikimedia.org/wiki/Help:Contents User's Guide] for information on using the wiki software.

File:SOP Mask Aligner 2023.pdf

2023-11-16T07:57:28Z

Sed002:

Main Page

2023-11-16T07:57:12Z

Sed002: /* Equipment and Standard Operating Procedures (SOPs) */

= Wiki for UiB's NanoStructures Laboratory. =

UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

== Equipment and Standard Operating Procedures (SOPs)==

* Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
** Primary staff: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.
_______________________________________________
* Electron-beam lithography: Raith e-Line
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: e-line google calendar
** SOP imaginng: [[:File:Raith_imaging SOP_2023.pdf]]
** SOP lithography: [[:File:SOP_Raith_E-Line_2023.pdf]]
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2023.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]
_______________________________________________
* Electron-beam evaporator: Temescal FC-2000
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Temescal google calendar
** SOP: [[:File:SOP_Temescal_EbeamEvaporator_2023.pdf]]
** Maintenance: [[:File:SOP_Temescal_EbeamEvaporator_Maintenance_2023.pdf]]

* Optical microscope & Stereomicroscope: Nikon Eclipse LV100ND & Nikon SMZ 1500
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP Eclipse LV100ND: [[:File:SOP_Nikon_LV_1000_2023.pdf]]
** SOP SMZ 1500: [[:File:SOP_Nikon_SMZ 1500_Stereomicroscope_2023.pdf]]
** Manual Eclipse LV100ND: ask Sabrina for .pdf file.

* Contact Angle Measurement System: dataphysics OCA 20L
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Contact Angle_2023.pdf]]
** Manual OCA 206 E: ask Sabrina for .pdf file.

* Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mask Aligner_2023.pdf]]
** Manual OCA 206 E: ask Sabrina for .pdf file.
_______________________________________________
* Reactive-ion etcher: Plasmatherm 790+
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Plasmatherm google calendar
** SOP: [[:File:SOP_Plasmatherm_2014.pdf]]
** Maintenance: [[:File:SOP_Plasmatherm_Maintenance_2014.pdf]]

* UV-lithography setup

* Spin-coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]
** SOP: [[:File:SOP_SpinCoater_2014.pdf]]

* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]

* Thin-film characterization: Filmetrics F-10
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]
** SOP: [[:File:SOP_Filmetrics_2014.pdf]]

== Procedures ==

* Lift-off

* Chrome wet-etch
** Owner: [[Martin|Martin Greve]]
** SOP: [[:File:SOP_chromewetech_2014.pdf]]

* old link: [[Procedures|Standard Operating Procedures]]
* old link: [[Tools|Available fabrication tools and facilities]]

== Facilities ==
*Equipment in nanolab: [[:File:Equipment in Nano-Lab_2015.pdf]]

Here is a description of the available facilities: [[:File:Facilities_2014.pdf]].

Here is a summary of the maintenance documents: [[:File:Facilities_Maintenance-2014.pdf]].

* [[DI-Water|De-ionized water unit and Neutraliser]]
* [[Cooling Water|Cooling Water]]
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]
* [[Air Conditioning/Ventilation]]
* [[Pressurized Air and Nitrogen Supply]]
*Sketch_NanoLab
**Equipment [[:File:Nano-Lab equipment_2014.png]]
**Safety [[:File:Nano-Lab safety_2014.png]]
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]

== Chemicals and Consumables==

* [[Waste/Disposal]]
* [[Consumables|Available consumables/chemicals and supplier information]]
* [[Main chemicals which should be always available]]
* [[Ordering]]

== Laboratory Documents ==

*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
** SOP:[[:File:SOP_Basics for the laboratory_2015.pdf]]

*Declaration document_Laboratory
**Declaration:[[:File:Declaration document_Nano-Lab_Users_2015.pdf]]

*Alarm signals and power failures
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]

*General tasks for the laboratory
**To-do list: [[:File:Tasks in the laboratory-general_2015.pdf]]

== People ==

*Guideline for new employees/students at ift
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]
**Campus map [[:File:Guideline_campus map.pdf]]

* [[Martin|Martin Greve]]
* [[Bodil|Bodil Holst]]
* [[Justas|Justas Zalieckas]]
* [[Sabrina Eder]]
* [[Bjoern|Bjørn Samelin]]
* [[Ranveig|Ranveig Flatabø]]

PhD students
* [[Carsten Hinzmann]]
* [[Mirjam Dyrhovden Fjell]]
* [[John Benjamin Lothe]]
* [[Simen Kaasa Hellner]]
* [[Marit Hougan]]

MSc-Students
* [[Olve Sti]]
* [[Minh Chi To]]
* [[John Benjamin Lothe]]

== Further Information ==

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

* MIT open course ware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]
* Wikibook on Microtechnology [http://en.wikibooks.org/wiki/Microtechnology]

= Information on using MediaWiki =

* [http://www.mediawiki.org/wiki/Manual:Configuration_settings Configuration settings list]
* [http://www.mediawiki.org/wiki/Manual:FAQ MediaWiki FAQ]
* [https://lists.wikimedia.org/mailman/listinfo/mediawiki-announce MediaWiki release mailing list]

Consult the [http://meta.wikimedia.org/wiki/Help:Contents User's Guide] for information on using the wiki software.