Temescal FC-2000 Electron-beam Evaporator

From Wiki for UiB's NanoStructures Laboratory
Evaporation tool.JPG



Procedure: Turn off

This procedure can be used to turn the FC-2000 system off, for example, if there will be a power-cut or if there is a problem with the cold water system.

  1. Make sure the whole system is under vacuum (Sample chamber, Source chamber and Cryopump chamber)
  2. From Auto-Mode switch to Manual-Mode (You need administrator or service privileges to do this)
  3. Turn off high-voltage power-supply at the bottom of electronics rack
  4. Turn off mechanical pump by clicking on it on the System map
  5. Close source isolation valve
  6. Close cryopump isolation valve
  7. Turn off cryopump by clicking on it on the System map
  8. Turn off TC by clicking on it on the System map
  9. Shutdown Software (Log Off User, Exit)
  10. Shutdown Windows XP, Turn off computer
  11. Turn off circuit breakers at back of electronics rack (inside panel-door)
  12. Turn off main breaker at Power distribution panel
  13. Turn off Uninterrupted Power Supply at top of electronics rack

Procedure: Turn on

  1. Make sure that circuit breakers at back of electronics rack (inside panel-door) are switched off
  2. Switch on main breaker at power distribution panel
  3. Switch on circuit breakers at back of electronics rack (inside panel-door), in the order left-to-right
  4. Wait until computer starts up, start up Temescal software
  5. Log on (service:factory)
  6. In the service pane go to Source 1. Set Ebeam Emission Current Scale to 1500mA.
  7. Regenerate Cryopump

Typical problems with the Temescal FC-2000

TC pump wont turn on

If the TC pump is turned off it is most likly because the cryopump is too hot. Look at the stage two temperature on the pump (insert image). If it is above 20 Kelvin the TC can not be turned on. When this happens the system needs to be regenerated.

How to regenerate the system

  1. Go to system map on the Temescal computer(see Temescal computer).
  2. Press detail in the upper right corner(see Interface for the Temescal).
  3. When detail is pressed click on the cryopump (see Interface for the Temescal, with regen menu up).
  4. In the menu that pops up press regen SC, this should start the regenration prosses. It will take around 6 hours to finish.
  5. To see that it finished look at the crypump again, the stage two temperature should be around 11 kelvin and the TC should be on.

Crystal fail

If a red message of crystal fail appers in the TCX (deposition control screen) try changing the crystal number in use. This is done by pressing menu and then navigate to sensor. Press menu when on the sensor button. You should now be in the sensor information menu. Press 1 (togle) on the panel to change between crystals 1 and 2. If both crystals give crystal fail the crystals need to be physically replaced in the machin.

How to replace crystals

Press vent PC (product chamber) in the auto menu. When the PC is at atmosfare you can open the the lid. Inside the "bowl" close to the front of the machin there are two flat circular metal rings(insert image) one of which is coverd by a metal screen. These are the depisition hight measurment crystals.

STOP Digital input

If you see this message on the deposition control screen, I am not sure what to do, I am trying to fix this error now(05.01.2012).

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