Tools
From Wiki for UiB's NanoStructures Laboratory
The lab currently includes the following tools:
- Raith E-Line Electron Beam Lithography Tool
- Jupiter AFM Oxford Instruments-Asylumn Research
- Nikon ECLIPSE LV100ND Optical Microscope
- Nikon SMZ1500 Stereo Microscope
- dadaphysics OCA 20L Contact Angle Meaasurement System
- Filmetrics Transmission and Reflection Spectrometer for thin-film characterization
- Temescal FC200 Electron-beam Evaporator
- Plasmatherm 790 Plus Reactive-ion Etcher
- ISO-class 5 cleanroom
- Cleanroom Fumehood
- Outerlab Fumehood
- Spin Coater Laurell WS-400BX-6NPP/Lite Spin Coater
- Wafer Hotplate
- Emitec SC7620 Mini Sputter Coater (Gold Palladium Target)
- SPTS XETCH Fluorination Chamber
- SÜSS Manual High End Mask Aligner MJB4
Lab Facilities:
