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* [[E-line|Raith E-Line Electron Beam Lithography Tool]] | * [[E-line|Raith E-Line Electron Beam Lithography Tool]] | ||
* [[ | * [[AFM|Jupiter AFM Oxford Instruments-Asylumn Research]] | ||
* [[Optical Microscope|Nikon ECLIPSE LV100ND Optical Microscope]] | |||
* [[Stereomicroscope|Nikon SMZ1500 Stereo Microscope]] | |||
* [[Contact Angle System|dadaphysics OCA 20L Contact Angle Meaasurement System]] | |||
* [[Spectrometer|Filmetrics Transmission and Reflection Spectrometer for thin-film characterization]] | |||
* [[Temescal Electron-beam Evaporator|Temescal FC200 Electron-beam Evaporator]] | |||
* [[Plasmatherm 790Plus|Plasmatherm 790 Plus Reactive-ion Etcher]] | * [[Plasmatherm 790Plus|Plasmatherm 790 Plus Reactive-ion Etcher]] | ||
* [[Cleanroom|ISO-class 5 cleanroom]] | * [[Cleanroom|ISO-class 5 cleanroom]] | ||
* [[Fumehood Cleanroom|Cleanroom Fumehood]] | * [[Fumehood Cleanroom|Cleanroom Fumehood]] | ||
* [[Fumehood Outerlab|Outerlab Fumehood]] | * [[Fumehood Outerlab|Outerlab Fumehood]] | ||
* [[Spinner| | * [[Spinner|Spin Coater Laurell WS-400BX-6NPP/Lite Spin Coater]] | ||
* [[Wafer Hotplate|Wafer Hotplate]] | * [[Wafer Hotplate|Wafer Hotplate]] | ||
* [[Sputter Coater|Sputter Coater (Gold Palladium Target)]] | * [[Sputter Coater|Emitec SC7620 Mini Sputter Coater (Gold Palladium Target)]] | ||
* [[ | * [[Fluorination Chamber|SPTS XETCH Fluorination Chamber]] | ||
* [[Mask Aligner|SÜSS Manual High End Mask Aligner MJB4]] | |||
Lab Facilities: | Lab Facilities: | ||
Latest revision as of 06:33, 17 November 2023
The lab currently includes the following tools:
- Raith E-Line Electron Beam Lithography Tool
- Jupiter AFM Oxford Instruments-Asylumn Research
- Nikon ECLIPSE LV100ND Optical Microscope
- Nikon SMZ1500 Stereo Microscope
- dadaphysics OCA 20L Contact Angle Meaasurement System
- Filmetrics Transmission and Reflection Spectrometer for thin-film characterization
- Temescal FC200 Electron-beam Evaporator
- Plasmatherm 790 Plus Reactive-ion Etcher
- ISO-class 5 cleanroom
- Cleanroom Fumehood
- Outerlab Fumehood
- Spin Coater Laurell WS-400BX-6NPP/Lite Spin Coater
- Wafer Hotplate
- Emitec SC7620 Mini Sputter Coater (Gold Palladium Target)
- SPTS XETCH Fluorination Chamber
- SÜSS Manual High End Mask Aligner MJB4
Lab Facilities: