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= Wiki for UiB's NanoStructures Laboratory. =
= Wiki for UiB's NanoStructures Laboratory. =


UiB's NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.
UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.
 
In addition we have several imaging and analysis tools like Optical Microscopes, an AFM, a Thin Film measurements system and a Contact Angle measurement system.  


We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.  
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.  
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== Equipment and Standard Operating Procedures (SOPs)==
== Equipment and Standard Operating Procedures (SOPs)==


* Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
** Primary staff / Contact: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.
_______________________________________________
* Electron-beam lithography: Raith e-Line
* Electron-beam lithography: Raith e-Line
** Owner: [[Martin|Martin Greve]]
** Reservation: e-line google calendar
** Reservation: [[E-Line Calendar|e-Line Reservation Calendar]]
** SOP imaginng: [[:File:Raith_imaging SOP_2023.pdf]]
** SOP: [[:File:SOP_Raith_E-Line-3_2014.pdf]]
** SOP lithography: [[:File:SOP_Raith_E-Line_2023.pdf]]
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2014.pdf]]
** Maintenance: [[:File:SOP_Raith_E-Line_Maintenance_2023.pdf]]
 
* Reactive-ion etcher: Plasmatherm 790+
** Owner: [[Xiaodong|Xiaodong Guo]]
** Reservation: [[Plasmatherm Calendar|Plasmatherm Reservation Calendar]]
** SOP: [[File:SOP_Plasmatherm.doc||Plasmatherm 790+ SOP]]
** Maintenance: [[File:SOP_Plasmatherm_Maintenance.doc||Plasmatherm 790+ Maintenance SOP]]


* Sputter coater
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]
_______________________________________________
* Electron-beam evaporator: Temescal FC-2000
* Electron-beam evaporator: Temescal FC-2000
** Owner: [[Xiaodong|Xiaodong Guo]]
** Reservation: Temescal google calendar
** Reservation: [[Temescal Calendar|Temescal FC-2000 Reservation Calendar]]
** SOP: [[:File:SOP_Temescal_EbeamEvaporator_2023.pdf]]
** SOP: [[File:SOP_Temescal.doc||Temescal FC-2000 SOP]]
** Maintenance: [[:File:SOP_Temescal_EbeamEvaporator_Maintenance_2023.pdf]]
** Maintenance: [[File:SOP_Temescal_Maintenance.doc||Temescal FC-2000 Maintenance SOP]]


* UV-lithography setup
* Optical microscope & Stereomicroscope: Nikon Eclipse LV100ND & Nikon SMZ 1500
** Reservation: no reservation needed
** SOP Eclipse LV100ND: [[:File:SOP_Nikon_LV_1000_2023.pdf]]
** SOP SMZ 1500: [[:File:SOP_Nikon_SMZ 1500_Stereomicroscope_2023.pdf]]
** Manual Eclipse LV100ND: ask Sabrina for .pdf file.


* Spin-coater
* Contact Angle Measurement System: dataphysics OCA 20L
** Owner: [[Martin|Martin Greve]]
** Reservation: no reservation needed
** Reservation: [[Spin Coater Calendar|Spin Coater Reservation Calendar]]
** SOP: [[:File:SOP_Contact Angle_2023.pdf]]
** SOP: [[File:SOP_SpinCoater.doc||Spin Coater SOP]]
** Manual OCA 206 E: ask Sabrina for .pdf file.


* Convection Oven
* Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec
** Owner: [[Xiaodong|Xiaodong Guo]]
** Reservation: no reservation needed
** Reservation: [[Convection Oven Calendar|Convection Oven Reservation Calendar]]
** SOP: [[:File:SOP_Mask Aligner_2023.pdf]]
** SOP: [[File:SOP_convectionoven.doc||Convection Oven SOP]]
** Manual MJB-4: ask Sabrina for .pdf file.
_______________________________________________
* Reactive-ion etcher: Plasmatherm 790+
** Reservation: Plasmatherm google calendar
** SOP: [[:File:SOP_Plasmatherm_790Plus_2023.pdf]]
** Maintenance: [[:File:SOP_Plasmatherm_790Plus_Maintenance_2023.pdf]]


* Hotplates
* UV-lithography setup
** Reservation: no reservation needed
** SOP: direct training


* Ultrasonic Bath
* Spin-coater
 
** Reservation: no reservation needed
* Sputter coater
** SOP: [[:File:SOP_Laurell WS 400BX Spin coater_2023.pdf]]
** Owner: [[Xiaodong|Xiaodong Guo]]
** Manual: [[:File:LITE_Manual_WE-400BX_Spin coater_c.pdf]]
** Reservation: [[Sputter Coater|Sputter Coater Reservation Calendar]]
** SOP: [[File:SOP_Sputter_Coater||Sputter Coater SOP]]


* Thin-film characterization: Filmetrics F-10
* Thin-film characterization: Filmetrics F-10
** Owner: [[Martin|Martin Greve]]
** Reservation: no reservation needed
** Reservation: [[Filmetrics F-10 Calendar|Filmetrics F-10 Reservation Calendar]]
** SOP: [[:File:SOP_Filmetrics_2023.pdf]]
** SOP: [[File:SOP_Filmetrics.doc||Filmetrics F-10 SOP]]
_______________________________________________
* Atomic Force Microscope: Jupiter AFM Oxford Instruments - Asylumn Research
** Reservation: AFM google calendar
** SOP: [[:File:SOP_Jupiter AFM_2023.pdf]]
** Manual:
*** AR Jupiter User Guide_19C: ask Sabrina for .pdf file.
*** AR Applications Guide_19C: ask Sabrina for .pdf file.
_______________________________________________
* Fluorination Chamber: SPTS XETCH
** Reservation: no reservation needed
** SOP: [[:File:SOP_XetchX3_Fluorination chamber_2023.pdf]]
** Manual:[[:File:Xactic-XetchX3-System-Manual.pdf]]


* [[Cleanroom|ISO-class 5 cleanroom]]
== Procedures ==
* [[Fumehood Cleanroom|Cleanroom Fumehood]]
* [[Fumehood Outerlab|Outerlab Fumehood]]


* Lift-off
* Lift-off
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* Chrome wet-etch
* Chrome wet-etch
** Owner: [[Martin|Martin Greve]]
** Owner: [[Martin|Martin Greve]]
** SOP: [[File:SOP_chromewetech.doc||Chrome wet-etch SOP]]
** SOP: [[:File:SOP_chromewetech_2014.pdf]]
 
*Basic rules for the laboratory
** SOP:[[:File:SOP_Basics for the laboratory_2014.pdf]]
 
*Alarm signals and power failures
**SOP:[[:File:SOP_Alarm signals_Power failure_2014.pdf]]
 
*Sketches NanoLab
**Emergency facilities [[:File:Nano-Lab safety_2014.png]]
**Equipment [[:File:Nano-Lab equipment_2014.png]]
**Power sockets [[:File:Nano-Lab power sockets_2014.png]]
**Cooling water distribution [[:File:Cooling water distribution_2014.jpg]]
**DI water and waste water [[:File:DI_waste water2014.jpg]]
**Pressurized air [[:File:Pressurised Air-2014.jpg]]
**Ventilation [[:File:ventilation-2014.jpg]]
 
*Guideline for new employees/students at ift
**Guideline [[:File:Guideline for new employees and students at ift_2014.pdf]]
**Campus map [[:File:Guideline_campus map.pdf]]
 


* old link: [[Procedures|Standard Operating Procedures]]
* old link: [[Procedures|Standard Operating Procedures]]
Line 85: Line 86:


== Facilities ==
== Facilities ==
*Equipment in nanolab: [[:File:Nanogroup Instrumentation_2023.pdf]]
* Old Equipment list 2015: [[:File:Equipment in Nano-Lab_2015.pdf]]


Here is a description of the available facilities: [[File:Facilities.doc||Facilities Documentation]].
Here is a description of the available facilities (old): [[:File:Facilities_2014.pdf]].


Here is a summary of the maintenance documents: [[File:Facilities_Maintenance.doc||Facilities Maintenance Documentation]].
Here is a summary of the maintenance documents (old): [[:File:Facilities_Maintenance-2014.pdf]].


* [[DI-Water|De-ionized water unit]]
* [[DI-Water|De-ionized water unit and Neutraliser]]
* [[Neutralizer|Waste Water Neutralizer]]
* [[Scrubber|Exhaust Scrubber for fumehood exhaust]]
* [[Cooling Water|Cooling Water]]
* [[Cooling Water|Cooling Water]]
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]
* [[Nitrogen|Nitrogen 5.0 Pressure Swing Adsorption Unit]]
* [[Electricity|Information on Electricity]]
* [[Air Conditioning/Ventilation]]
* [[Air Conditioning|Air Conditioning]]
* [[Pressurized Air and Nitrogen Supply]]
* [[Pressurized Air|Pressurized Air]]
*Sketch_NanoLab
* [[Chemical Storage|Storage for Chemicals]]
**Equipment [[:File:Nano-Lab equipment_2014.png]]
**Safety [[:File:Nano-Lab safety_2014.png]]
**Power sockets/electricity [[:File:Nano-Lab power sockets_2014.png]]
 
== Chemicals and Consumables==
 
* [[Waste/Disposal]]
* [[Consumables|Available consumables/chemicals and supplier information]]
* [[Main chemicals which should be always available]]
* Ordering: please contact Sabrina


== Laboratory Documents ==
== Laboratory Documents ==


* [[Rules|Laboratory Code of Conduct / Clothing rules]]
*Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
* [[Safety|Safety Guidelines and Information]]
** SOP:[[:File:Basics for the laboratory_2024.pdf]]
* [[Cleaning|Lab Cleaning Procedures]]
 
* [[Consumables|Available consumables and supplier information]]
*Alarm signals and power failures
**SOP:[[:File:SOP_Alarm signals_Power failure_2015.pdf]]


== People ==
== People ==
 
Professors / Engineers / Researchers / Post Doc`s
* [[Martin|Martin Greve]]
* [[Bodil|Bodil Holst]]
* [[Bodil|Bodil Holst]]
* [[Justas|Justas Zalieckas]]
* [[Sabrina Eder]]
* [[Bjoern|Bjørn Samelin]]
* [[Bjoern|Bjørn Samelin]]
* [[Xiaodong|Xiaodong Guo]]
* [[Ranveig|Ranveig Flatabø]]
* [[pengfei|Pengfei Han]]
 
* [[Martin|Martin Greve]]
 
* [[Rachid|Rachid Maad]]
PhD students
* [[Jarand|Jarand Gauteplass]]
* [[Carsten Hinzmann]]
* [[Mirjam Dyrhovden Fjell]]
* [[John Benjamin Lothe]]
* [[Simen Kaasa Hellner]]
* [[Marit Hougan]]
 
 
MSc-Students
* [[Olve Sti]]
* [[Minh Chi To]]
* [[John Benjamin Lothe]]
 
 
Guideline for new employees/students at ift
**Campus map [[:File:Guideline_campus map.pdf]]


== Further Information ==
== Further Information ==
Line 121: Line 149:
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:


* MIT open courseware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]
* MIT open course ware on nano processing [http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005/]
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]
* Resources at Chalmers (Swedish Nano-processing lab)[http://www.chalmers.se/mc2/EN/laboratories/nanofabrication/education-training/micro-nanoprocessing]
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]
* Useful recipes at Brigham Young University [http://www.cleanroom.byu.edu/]

Latest revision as of 09:41, 6 February 2024

Wiki for UiB's NanoStructures Laboratory.

UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

In addition we have several imaging and analysis tools like Optical Microscopes, an AFM, a Thin Film measurements system and a Contact Angle measurement system.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

Equipment and Standard Operating Procedures (SOPs)

  • Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
    • Primary staff / Contact: Martin Greve & Sabrina Eder
    • Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.

_______________________________________________

_______________________________________________

  • Contact Angle Measurement System: dataphysics OCA 20L
  • Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec

_______________________________________________

  • UV-lithography setup
    • Reservation: no reservation needed
    • SOP: direct training

_______________________________________________

  • Atomic Force Microscope: Jupiter AFM Oxford Instruments - Asylumn Research
    • Reservation: AFM google calendar
    • SOP: File:SOP_Jupiter AFM_2023.pdf
    • Manual:
      • AR Jupiter User Guide_19C: ask Sabrina for .pdf file.
      • AR Applications Guide_19C: ask Sabrina for .pdf file.

_______________________________________________

Procedures

  • Lift-off

Facilities

Here is a description of the available facilities (old): File:Facilities_2014.pdf.

Here is a summary of the maintenance documents (old): File:Facilities_Maintenance-2014.pdf.

Chemicals and Consumables

Laboratory Documents

People

Professors / Engineers / Researchers / Post Doc`s


PhD students


MSc-Students


Guideline for new employees/students at ift

Further Information

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

  • MIT open course ware on nano processing [1]
  • Resources at Chalmers (Swedish Nano-processing lab)[2]
  • Useful recipes at Brigham Young University [3]
  • Wikibook on Microtechnology [4]

Information on using MediaWiki

Consult the User's Guide for information on using the wiki software.

Retrieved from "http://nanolab.wiki.uib.no/index.php?title=Main_Page&oldid=2038"