Tools: Difference between revisions
Created page with 'The lab currently includes the following tools: * Raith E-Line Electron Beam Lithography Tool * Temescal Electron-beam Evaporator * [[Plasmatherm 790Plus|…' |
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* [[Sputter Coater|Sputter Coater (Gold Palladium Target)]] | * [[Sputter Coater|Sputter Coater (Gold Palladium Target)]] | ||
* [[Spectrometer|Filmetrics Transmission and Reflection Spectrometer for thin-film characterization]] | * [[Spectrometer|Filmetrics Transmission and Reflection Spectrometer for thin-film characterization]] | ||
Lab Facilities: | Lab Facilities: |
Revision as of 14:57, 11 October 2011
The lab currently includes the following tools:
- Raith E-Line Electron Beam Lithography Tool
- Temescal Electron-beam Evaporator
- Plasmatherm 790 Plus Reactive-ion Etcher
- ISO-class 5 cleanromm
- Cleanroom Fumehood
- Outerlab Fumehood
- SPI Spin Coater
- Wafer Hotplate
- Sputter Coater (Gold Palladium Target)
- Filmetrics Transmission and Reflection Spectrometer for thin-film characterization
Lab Facilities: