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Wiki for UiB's NanoStructures Laboratory.

UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

Equipment and Standard Operating Procedures (SOPs)

• Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
  • Primary staff: Martin Greve & Sabrina Eder
  • Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.

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• Electron-beam lithography: Raith e-Line
  • Owner: Martin Greve & Sabrina Eder
  • Reservation: e-line google calendar
  • SOP imaginng: File:Raith_imaging SOP_2023.pdf
  • SOP lithography: File:SOP_Raith_E-Line_2023.pdf
  • Maintenance: File:SOP_Raith_E-Line_Maintenance_2023.pdf

• Sputter coater
  • Owner: Martin Greve & Sabrina Eder
  • Reservation: no reservation needed
  • SOP: File:SOP_Mini_SputterCoater_2023.pdf

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• Electron-beam evaporator: Temescal FC-2000
  • Owner: Martin Greve & Sabrina Eder
  • Reservation: Temescal google calendar
  • SOP: File:SOP_Temescal_EbeamEvaporator_2023.pdf
  • Maintenance: File:SOP_Temescal_EbeamEvaporator_Maintenance_2023.pdf

• Nikon optical microscope & Stereomicroscope
  • Owner: Martin Greve & Sabrina Eder
  • Reservation: no reservation needed
  • SOP Eclipse LV100ND: File:SOP_Nikon_LV_1000_2023.pdf
  • Manual Eclipse LV100ND: File:Nikon LV-100D-U Manual.pdf

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• Reactive-ion etcher: Plasmatherm 790+
  • Owner: Martin Greve & Sabrina Eder
  • Reservation: Plasmatherm Reservation Calendar
  • SOP: File:SOP_Plasmatherm_2014.pdf
  • Maintenance: File:SOP_Plasmatherm_Maintenance_2014.pdf

• UV-lithography setup

• Spin-coater
  • Owner: Martin Greve & Sabrina Eder
  • Reservation: Spin Coater Reservation Calendar
  • SOP: File:SOP_SpinCoater_2014.pdf

• Sputter coater
  • Owner: Martin Greve & Sabrina Eder
  • Reservation: no reservation needed
  • SOP: File:SOP_Mini_SputterCoater_2023.pdf

• Thin-film characterization: Filmetrics F-10
  • Owner: Martin Greve & Sabrina Eder
  • Reservation: Filmetrics F-10 Reservation Calendar
  • SOP: File:SOP_Filmetrics_2014.pdf

Procedures

• Lift-off

• Chrome wet-etch
  • Owner: Martin Greve
  • SOP: File:SOP_chromewetech_2014.pdf

• old link: Standard Operating Procedures
• old link: Available fabrication tools and facilities

Facilities

• Equipment in nanolab: File:Equipment in Nano-Lab_2015.pdf

Here is a description of the available facilities: File:Facilities_2014.pdf.

Here is a summary of the maintenance documents: File:Facilities_Maintenance-2014.pdf.

• De-ionized water unit and Neutraliser
• Cooling Water
• Nitrogen 5.0 Pressure Swing Adsorption Unit
• Air Conditioning/Ventilation
• Pressurized Air and Nitrogen Supply
• Sketch_NanoLab
  • Equipment File:Nano-Lab equipment_2014.png
  • Safety File:Nano-Lab safety_2014.png
  • Power sockets/electricity File:Nano-Lab power sockets_2014.png

Chemicals and Consumables

• Waste/Disposal
• Available consumables/chemicals and supplier information
• Main chemicals which should be always available
• Ordering

Laboratory Documents

• Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
  • SOP:File:SOP_Basics for the laboratory_2015.pdf

• Declaration document_Laboratory
  • Declaration:File:Declaration document_Nano-Lab_Users_2015.pdf

• Alarm signals and power failures
  • SOP:File:SOP_Alarm signals_Power failure_2015.pdf

• General tasks for the laboratory
  • To-do list: File:Tasks in the laboratory-general_2015.pdf

People

• Guideline for new employees/students at ift
  • Guideline File:Guideline for new employees and students at ift_2014.pdf
  • Campus map File:Guideline_campus map.pdf

• Martin Greve
• Bodil Holst
• Justas Zalieckas
• Sabrina Eder
• Bjørn Samelin
• Ranveig Flatabø

PhD students

• Carsten Hinzmann
• Mirjam Dyrhovden Fjell
• John Benjamin Lothe
• Simen Kaasa Hellner
• Marit Hougan

MSc-Students

• Olve Sti
• Minh Chi To
• John Benjamin Lothe

Further Information

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

• MIT open course ware on nano processing [1]
• Resources at Chalmers (Swedish Nano-processing lab)[2]
• Useful recipes at Brigham Young University [3]
• Wikibook on Microtechnology [4]

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