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From Wiki for UiB's NanoStructures Laboratory
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* Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
* Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
** Primary staff: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Primary staff / Contact: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.
** Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.
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* Electron-beam lithography: Raith e-Line
* Electron-beam lithography: Raith e-Line
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: e-line google calendar
** Reservation: e-line google calendar
** SOP imaginng: [[:File:Raith_imaging SOP_2023.pdf]]
** SOP imaginng: [[:File:Raith_imaging SOP_2023.pdf]]
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* Sputter coater
* Sputter coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]
** SOP: [[:File:SOP_Mini_SputterCoater_2023.pdf]]
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* Electron-beam evaporator: Temescal FC-2000
* Electron-beam evaporator: Temescal FC-2000
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Temescal google calendar
** Reservation: Temescal google calendar
** SOP: [[:File:SOP_Temescal_EbeamEvaporator_2023.pdf]]
** SOP: [[:File:SOP_Temescal_EbeamEvaporator_2023.pdf]]
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* Optical microscope & Stereomicroscope: Nikon Eclipse LV100ND & Nikon SMZ 1500
* Optical microscope & Stereomicroscope: Nikon Eclipse LV100ND & Nikon SMZ 1500
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** Reservation: no reservation needed
** SOP Eclipse LV100ND: [[:File:SOP_Nikon_LV_1000_2023.pdf]]
** SOP Eclipse LV100ND: [[:File:SOP_Nikon_LV_1000_2023.pdf]]
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* Contact Angle Measurement System: dataphysics OCA 20L
* Contact Angle Measurement System: dataphysics OCA 20L
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** Reservation: no reservation needed
** SOP: [[:File:SOP_Contact Angle_2023.pdf]]
** SOP: [[:File:SOP_Contact Angle_2023.pdf]]
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* Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec
* Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** Reservation: no reservation needed
** SOP: [[:File:SOP_Mask Aligner_2023.pdf]]
** SOP: [[:File:SOP_Mask Aligner_2023.pdf]]
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* Reactive-ion etcher: Plasmatherm 790+
* Reactive-ion etcher: Plasmatherm 790+
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: Plasmatherm google calendar
** Reservation: Plasmatherm google calendar
** SOP: [[:File:SOP_Plasmatherm_790Plus_2023.pdf]]
** SOP: [[:File:SOP_Plasmatherm_790Plus_2023.pdf]]
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* UV-lithography setup
* UV-lithography setup
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** Reservation: no reservation needed
** SOP: direct training
** SOP: direct training


* Spin-coater
* Spin-coater
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** Reservation: no reservation needed
** SOP: [[:File:SOP_Laurell WS 400BX Spin coater_2023.pdf]]
** SOP: [[:File:SOP_Laurell WS 400BX Spin coater_2023.pdf]]
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* Thin-film characterization: Filmetrics F-10
* Thin-film characterization: Filmetrics F-10
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** Reservation: no reservation needed
** SOP: [[:File:SOP_Filmetrics_2023.pdf]]
** SOP: [[:File:SOP_Filmetrics_2023.pdf]]
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* Atomic Force Microscope: Jupiter AFM Oxford Instruments - Asylumn Research
* Atomic Force Microscope: Jupiter AFM Oxford Instruments - Asylumn Research
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: AFM google calendar
** Reservation: AFM google calendar
** SOP: [[:File:SOP_Jupiter AFM_2023.pdf]]
** SOP: [[:File:SOP_Jupiter AFM_2023.pdf]]
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* Fluorination Chamber: SPTS XETCH
* Fluorination Chamber: SPTS XETCH
** Owner: [[Martin|Martin Greve]] & [[Sabrina|Sabrina Eder]]
** Reservation: no reservation needed
** Reservation: no reservation needed
** SOP: [[:File:SOP_XetchX3_Fluorination chamber_2023.pdf]]
** SOP: [[:File:SOP_XetchX3_Fluorination chamber_2023.pdf]]

Revision as of 13:26, 5 February 2024

Wiki for UiB's NanoStructures Laboratory.

UiB's NanoStructures laboratory is equipped with modern thin-film processing, lithography equipment as well as several imaging tools. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

In addition we have several imaging and analysis tools like Optical Microscopes, an AFM, a Thin Film measurements system and a Contact Angle measurement system.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

Equipment and Standard Operating Procedures (SOPs)

  • Nanogroup lab-spaces: Clean room and chemical lab-spaces as well as characterisation tools
    • Primary staff / Contact: Martin Greve & Sabrina Eder
    • Access: to access the Nanogroup lab-spaces one requires an introduction and basic training by UiB personnel.

_______________________________________________

_______________________________________________

  • Contact Angle Measurement System: dataphysics OCA 20L
  • Mask Aligner: High End Mask Aligner MJB4 SÜSS Micro Tec

_______________________________________________

  • UV-lithography setup
    • Reservation: no reservation needed
    • SOP: direct training

_______________________________________________

  • Atomic Force Microscope: Jupiter AFM Oxford Instruments - Asylumn Research
    • Reservation: AFM google calendar
    • SOP: File:SOP_Jupiter AFM_2023.pdf
    • Manual:
      • AR Jupiter User Guide_19C: ask Sabrina for .pdf file.
      • AR Applications Guide_19C: ask Sabrina for .pdf file.

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Procedures

  • Lift-off


Facilities

Here is a description of the available facilities (old): File:Facilities_2014.pdf.

Here is a summary of the maintenance documents (old): File:Facilities_Maintenance-2014.pdf.

Chemicals and Consumables

Laboratory Documents


People


PhD students


MSc-Students

Further Information

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

  • MIT open course ware on nano processing [1]
  • Resources at Chalmers (Swedish Nano-processing lab)[2]
  • Useful recipes at Brigham Young University [3]
  • Wikibook on Microtechnology [4]

Information on using MediaWiki

Consult the User's Guide for information on using the wiki software.