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Wiki for UiB's NanoStructures Laboratory.

UiB's NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

Equipment and Standard Operating Procedures (SOPs)

• Electron-beam lithography: Raith e-Line
  • Owner: Erik Mannseth
  • Reservation: e-Line Reservation Calendar
  • SOP: File:SOP Raith E-Line.doc
  • Maintenance: File:SOP Raith E-Line Maintenance.doc

• Reactive-ion etcher: Plasmatherm 790+
  • Owner: Xiaodong Guo
  • Reservation: Plasmatherm Reservation Calendar
  • SOP: File:SOP Plasmatherm.doc
  • Maintenance: File:SOP Plasmatherm Maintenance.doc

• Electron-beam evaporator: Temescal FC-2000
  • Owner: Xiaodong Guo
  • Reservation: Temescal FC-2000 Reservation Calendar
  • SOP: File:SOP Temescal.doc
  • Maintenance: File:SOP Temescal Maintenance.doc

• UV-lithography setup

• Spin-coater
  • Owner: Erik Mannseth
  • Reservation: Spin Coater Reservation Calendar
  • SOP: File:SOP SpinCoater.doc

• Convection Oven
  • Owner: Xiaodong Guo
  • Reservation: Convection Oven Reservation Calendar
  • SOP: Convection Oven SOP

• Hotplates

• Ultrasonic Bath

• Sputter coater
  • Owner: Xiaodong Guo
  • Reservation: Sputter Coater Reservation Calendar
  • SOP: Sputter Coater SOP

• Thin-film characterization: Filmetrics F-10
  • Owner: Erik Mannseth
  • Reservation: Filmetrics F-10 Reservation Calendar
  • SOP: File:SOP Filmetrics.doc

• ISO-class 5 cleanroom
• Cleanroom Fumehood
• Outerlab Fumehood

• Lift-off

• Chrome wet-etch
  • Owner: Erik Mannseth
  • SOP: File:SOP chromewetech.doc

• old link: Standard Operating Procedures
• old link: Available fabrication tools and facilities

Facilities

Here is a description of the available facilities: File:Facilities.doc.

Here is a summary of the maintenance documents: File:Facilities Maintenance.doc.

• De-ionized water unit
• Waste Water Neutralizer
• Exhaust Scrubber for fumehood exhaust
• Cooling Water
• Nitrogen 5.0 Pressure Swing Adsorption Unit
• Information on Electricity
• Air Conditioning
• Pressurized Air
• Storage for Chemicals

Laboratory Documents

• Laboratory Code of Conduct / Clothing rules
• Safety Guidelines and Information
• Lab Cleaning Procedures
• Available consumables and supplier information

People

• Bodil Holst
• Bjørn Samelin
• Thomas Reisinger
• Erik Mannseth
• Xiaodong Guo
• Martin Greve
• Rachid Maad
• Thomas Bolstad
• Thomas Håvardstun
• Jarand Gauteplass

Further Information

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

• MIT open courseware on nano processing [1]
• Resources at Chalmers (Swedish Nano-processing lab)[2]
• Useful recipes at Brigham Young University [3]
• Wikibook on Microtechnology [4]

Information on using MediaWiki

• Configuration settings list
• MediaWiki FAQ
• MediaWiki release mailing list

Consult the User's Guide for information on using the wiki software.