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* [[FC-2000|Temescal Electron-beam Evaporator]] | * [[FC-2000|Temescal Electron-beam Evaporator]] | ||
* [[Plasmatherm 790Plus|Plasmatherm 790 Plus Reactive-ion Etcher]] | * [[Plasmatherm 790Plus|Plasmatherm 790 Plus Reactive-ion Etcher]] | ||
* [[Cleanroom|ISO-class 5 | * [[Cleanroom|ISO-class 5 cleanroom]] | ||
* [[Fumehood Cleanroom|Cleanroom Fumehood]] | * [[Fumehood Cleanroom|Cleanroom Fumehood]] | ||
* [[Fumehood Outerlab|Outerlab Fumehood]] | * [[Fumehood Outerlab|Outerlab Fumehood]] | ||
Revision as of 13:25, 12 October 2011
The lab currently includes the following tools:
- Raith E-Line Electron Beam Lithography Tool
- Temescal Electron-beam Evaporator
- Plasmatherm 790 Plus Reactive-ion Etcher
- ISO-class 5 cleanroom
- Cleanroom Fumehood
- Outerlab Fumehood
- SPI Spin Coater
- Wafer Hotplate
- Sputter Coater (Gold Palladium Target)
- Filmetrics Transmission and Reflection Spectrometer for thin-film characterization
Lab Facilities: