Tools

The lab currently includes the following tools:

• Raith E-Line Electron Beam Lithography Tool
• Temescal Electron-beam Evaporator
• Plasmatherm 790 Plus Reactive-ion Etcher
• ISO-class 5 cleanroom
• Cleanroom Fumehood
• Outerlab Fumehood
• SPI Spin Coater
• Wafer Hotplate
• Sputter Coater (Gold Palladium Target)
• Filmetrics Transmission and Reflection Spectrometer for thin-film characterization

Lab Facilities:

• De-ionized water unit
• Waste Water Neutralizer
• Exhaust Scrubber for fumehood exhaust
• Cooling Water
• Nitrogen 5.0 Pressure Swing Adsorption Unit
• Information on Electricity
• Air Conditioning
• Pressurized Air
• Storage for Chemicals