Wiki for UiB's NanoStructures Laboratory.

UiB's NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.

We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.

Equipment and Standard Operating Procedures (SOPs)

Electron-beam lithography: Raith e-Line
- Owner: Martin Greve
- Reservation: e-Line Reservation Calendar
- SOP: File:SOP_Raith_E-Line-3_2014.pdf
- Maintenance: File:SOP_Raith_E-Line_Maintenance_2014.pdf

Reactive-ion etcher: Plasmatherm 790+
- Owner: Xiaodong Guo
- Reservation: Plasmatherm Reservation Calendar
- SOP: File:SOP Plasmatherm.doc
- Maintenance: File:SOP Plasmatherm Maintenance.doc

Electron-beam evaporator: Temescal FC-2000
- Owner: Xiaodong Guo
- Reservation: Temescal FC-2000 Reservation Calendar
- SOP: File:SOP Temescal.doc
- Maintenance: File:SOP Temescal Maintenance.doc

UV-lithography setup

Spin-coater
- Owner: Martin Greve
- Reservation: Spin Coater Reservation Calendar
- SOP: File:SOP SpinCoater.doc

Convection Oven
- Owner: Xiaodong Guo
- Reservation: Convection Oven Reservation Calendar
- SOP: Convection Oven SOP

Hotplates

Ultrasonic Bath

Sputter coater
- Owner: Xiaodong Guo
- Reservation: Sputter Coater Reservation Calendar
- SOP: Sputter Coater SOP

Thin-film characterization: Filmetrics F-10
- Owner: Martin Greve
- Reservation: Filmetrics F-10 Reservation Calendar
- SOP: File:SOP Filmetrics.doc

Lift-off

Chrome wet-etch
- Owner: Martin Greve
- SOP: File:SOP_chromewetech_2014.pdf

Basic rules for the laboratory
- SOP:File:SOP_Basics for the laboratory_2014.pdf

Alarm signals and power failures
- SOP:File:SOP_Alarm signals_Power failure_2014.pdf

Sketches NanoLab
- Emergency facilities File:Nano-Lab safety_2014.png
- Equipment File:Nano-Lab equipment_2014.png
- Power sockets File:Nano-Lab power sockets_2014.png
- Cooling water distribution File:Cooling water distribution_2014.jpg
- DI water and waste water File:DI_waste water2014.jpg
- Pressurized air File:Pressurised Air-2014.jpg
- Ventilation File:ventilation-2014.jpg

Guideline for new employees/students at ift
- Guideline File:Guideline for new employees and students at ift_2014.pdf
- Campus map File:Guideline_campus map.pdf

old link: Standard Operating Procedures
old link: Available fabrication tools and facilities

Facilities

Here is a description of the available facilities: File:Facilities.doc.

Here is a summary of the maintenance documents: File:Facilities Maintenance.doc.

Laboratory Documents

People

Further Information

There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:

MIT open courseware on nano processing [1]
Resources at Chalmers (Swedish Nano-processing lab)[2]
Useful recipes at Brigham Young University [3]
Wikibook on Microtechnology [4]

Information on using MediaWiki

Consult the User's Guide for information on using the wiki software.