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Wiki for UiB's NanoStructures Laboratory.
UiB's NanoStructures laboratory is equipped with modern thin-film processing and lithography equipment. The lab is built around an electron-beam lithography tool (Raith e-Line) which can be used to pattern resist thin-films with minimal structure sizes of the order of 10 nanometer. The resist layers can be used to transfer the pattern into other thin-films that are either deposited using an electron-beam evaporator (Temescal FC-2000) or a spin-coater. For the pattern transfer a reactive-ion etcher (RIE, Plasmatherm 790+) is available as well as a wet-bench fumehood to perform wet-etch and lift-off processes. An improvised UV-exposure setup is available for crude patterning.
We use this WikiMedia site for documentation of all equipment, facilities and standard operating procedures of the laboratory. As a registered user of the laboratory you will receive permission to log into this site, which will allow you to contribute to the documentation and give information on the processes particular to your project.
Equipment and Standard Operating Procedures (SOPs)
- Electron-beam lithography: Raith e-Line
- Owner: Martin Greve
- Reservation: e-Line Reservation Calendar
- SOP: File:SOP_Raith_E-Line-3_2014.pdf
- Maintenance: File:SOP_Raith_E-Line_Maintenance_2014.pdf
- Reactive-ion etcher: Plasmatherm 790+
- Owner: Xiaodong Guo
- Reservation: Plasmatherm Reservation Calendar
- SOP: File:SOP_Plasmatherm_2014.pdf
- Maintenance: File:SOP_Plasmatherm_Maintenance_2014.pdf
- Electron-beam evaporator: Temescal FC-2000
- Owner: Xiaodong Guo
- Reservation: Temescal FC-2000 Reservation Calendar
- SOP: File:SOP_Temescal_EbeamEvaporator-1_2014.pdf
- Maintenance: File:SOP_Temescal_Maintenance_2014.pdf
- UV-lithography setup
- Spin-coater
- Owner: Martin Greve
- Reservation: Spin Coater Reservation Calendar
- SOP: File:SOP_SpinCoater_2014.pdf
- Convection Oven
- Owner: Xiaodong Guo
- Reservation: Convection Oven Reservation Calendar
- SOP: Convection Oven SOP
- Hotplates
- Ultrasonic Bath
- Sputter coater
- Owner: Xiaodong Guo
- Reservation: Sputter Coater Reservation Calendar
- SOP: Sputter Coater SOP
- Thin-film characterization: Filmetrics F-10
- Owner: Martin Greve
- Reservation: Filmetrics F-10 Reservation Calendar
- SOP: File:SOP_Filmetrics_2014.pdf
- Lift-off
- Chrome wet-etch
- Owner: Martin Greve
- SOP: File:SOP_chromewetech_2014.pdf
- old link: Standard Operating Procedures
- old link: Available fabrication tools and facilities
Facilities
Here is a description of the available facilities: File:Facilities_2014.pdf.
Here is a summary of the maintenance documents: File:Facilities_Maintenance-2014.pdf.
- De-ionized water unit and Neutraliser
- Exhaust Scrubber for fumehood exhaust
- Cooling Water
- Nitrogen 5.0 Pressure Swing Adsorption Unit
- Information on Electricity
- Air Conditioning/Ventilation
- Pressurized Air and Nitrogen Supply
- Sketch_NanoLab
- Equipment File:Nano-Lab equipment_2014.png
- Safety File:Nano-Lab safety_2014.png
- Power sockets/electricity File:Nano-Lab power sockets_2014.png
Laboratory Documents
- Basic rules for the laboratory (Rules|Laboratory Code of Conduct/Clothing rules, Safety|Safety Guidelines and Information, Cleaning|Waste disposal)
- Declaration document_Laboratory
- Alarm signals and power failures
People
- Guideline for new employees/students at ift
- Bodil Holst
- Bjørn Samelin
- Xiaodong Guo
- Pengfei Han
- Martin Greve
- Rachid Maad
- Sabrina Eder
- NaureenAkhtar
- Melanie Ostermann
PhD students
MSc-Students
Further Information
There is a huge amount of information on Micro- and Nanofabrication on the web. Here are just some examples:
- MIT open courseware on nano processing [1]
- Resources at Chalmers (Swedish Nano-processing lab)[2]
- Useful recipes at Brigham Young University [3]
- Wikibook on Microtechnology [4]
Information on using MediaWiki
Consult the User's Guide for information on using the wiki software.