Tools
The lab currently includes the following tools:
- Raith E-Line Electron Beam Lithography Tool
- Jupiter AFM Oxford Instruments-Asylumn Research
- Temescal FC200
- Plasmatherm 790 Plus Reactive-ion Etcher
- ISO-class 5 cleanroom
- Cleanroom Fumehood
- Outerlab Fumehood
- Laurell WS-400BX-6NPP/Lite
- Wafer Hotplate
- Emitec SC7620 Mini Sputter Coater (Gold Palladium Target)
- Filmetrics Transmission and Reflection Spectrometer for thin-film characterization
Lab Facilities: